Hazardous Gas Monitoring. A Guide for Semiconductor and - download pdf or read online

By Logan T. White

ISBN-10: 0815514697

ISBN-13: 9780815514695

  • "Overall, i think that the booklet is a superb reference and advisorà " ù Paula Calabrese, Phoenix SSA Newsletter

Content:
Figures

, Page ix
Tables

, Page ix
Caveat

, Page x
Acknowledgements

, Page xi
Acronyms/abbreviations

, Page xii
1 - damaging gasoline Monitoring

, Pages 1-5
2 - Regulated Materials

, Pages 7-12
3 - precis of unsafe fuel tracking Codes

, Pages 13-80
4 - harmful gasoline tracking Sensors

, Pages 81-116
5 - tracking, Alarm and keep watch over Systems

, Pages 117-148
6 - tracking Exhaust remedy procedure Discharge

, Pages 149-154
7 - process Certification

, Pages 155-158
8 - Code Enforcement

, Pages 159-162
Appendix A - harmful gases usually monitored in semiconductor facilities

, Pages 163-166
Appendix B - Protocol for checking out poisonous fuel Detectors

, Pages 167-176
Appendix C - 1995 complement to the UFC desk A-VI-A-1 — Normalization factor

, Pages 177-178
Appendix D - protection process suppliers

, Pages 179-184
Glossary

, Pages 185-193
References

, Pages 195-201
Index

, Pages 203-206

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Additional info for Hazardous Gas Monitoring. A Guide for Semiconductor and Other Hazardous Occupancies

Sample text

1(4) shall be in accordance with Sections 2 701 and 2 703. 4 Quantities exceeding the maximum allowable quantity per control area. The storage and use of hazardous materials exceeding the maximum allowable quantity per control area indicated in Tables 2703. 1 (1) through 2 703. 1(4) shaft be in accordance with this chapter. 2 indirectly describes shutoff valve locations for HPM gases in a semiconductor fabrication facility. 3 indirectly describes shutoff valve locations for highly toxic and toxic gases.

The gas detection system shaft initiate a local alarm and transmit a signal to a constantly attended control station when a short-term hazard condition is detected. The alarm shaft be both visual and audible and shaft provide warning both inside and outside the area where gas is detected. The audible alarm shaft be distinct from all other alarms. Exception: Signal transmission to a constantly attended control station is not required where not more than one cylinder of highly toxic or toxic gas is stored.

Boron trichloride and hydrogen fluoride) and II! lesser hazards. The degree of required controls is dependent upon the gas class. The MHI and Class may normally be found in tables available from most fire departments enforcing this type of toxic gas ordinance. Appendix A of this guide provides the class of many gases used in semiconductor manufacture. Vapor Concentration @ 25 ~ Level of Concern (ppm) The MHI concept is being deleted from Silicon Valley TGOs in future editions. 130 (b)(l) P i p i n g .

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Hazardous Gas Monitoring. A Guide for Semiconductor and Other Hazardous Occupancies by Logan T. White


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